MEMS Studio, for MEMS/Sensor Design and Simulation
  • Functions:  Support for standard parametric cell (PCell) design, process and device modeling (FEM), layout design, 3D interface modeling, damping calculations, electrical characteristics simulation integration, Design Technology Co-Optimization (DTCO), etc.

  • Flow Components: pLogic, Advanced SDL, pLayout, pVerify, multi-physics field optimization interface and finite element analysis tools, 3D device cross-section analysis tools.

  • Applications:

  • Vibratory Gyroscope

  • SAR RF Filter

  • BAW RF Filter

  • FBAR

  • PMUT

  • CMUT

  • Piezoelectric Pressure Sensor

  • Piezoresistive Pressure Sensor

  • RF Switch

  • Microphone

  • Tactile Sensor